Micro-nano fabrication is a general term for a series of technologies for processing and manufacturing micro-nano devices. Integrated circuits, micro-resonant cavities, microfluidic, micro optoelectronic systems all depend on micro-nano fabrication. Fabrication process is one of the key factors that determine the device performance.
Our research group has been conducting research in the field of micro-nano fabrication for years. We have studied, analyzed and optimized the key process steps such as film deposition, lithography, etching and so on, enabling successful fabrication of ultra-low loss optical devices, which provide important experimental support for academic and industrial applications. We also have close collaborations with well-known universities both in China and around the world.
